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Wafer Transfer

Industrial Robots
  • Excellent structural rigidity.
  • Modular and highly customizable design.
  • High response brushless servo motors.
  • Absolute encoders for instant readiness after power up.
  • Handling radial and in-line wafer pick and place.
  • Standard RS-232 and TCP/IP interface communication.
  • Advanced 32-bit real-time motion control kernel.
  • Powerful wafer handling firmware.
  • Comprehensive software tools and utilities.
  • Software emulation for legacy robot macro commands.
  • General purpose digital inputs and outputs for custom use.
  • Class 1 clean-room environment compatibility.
  • Reliability; MTBF > 60000 hours, MCBF > 10,000,000 cycles.
Input Voltage Range
100 to 240VAC
Wafer Sizes
51mm, 76mm, 100mm, 125mm, 150mm, 200mm, 300mm
Encoder Type
Absolute
battery backup
Operating Temperature
50ºF to 104ºF
10ºC to 40ºC